Gas injection exCell

Peltier gas Stage 80

Compact size φ42 mm + Gas injection
Fine controle gas injection from Mas Flow
SiN window mems chips size of 5mmX5mm

Hidrogen Gas Injection data

MmNi3.6Al0.3Co0.7Mn0.4
hydrogen storage material

Aftert
injection H2

Overlay comparison
About 9% blaoted

Gaa injection system