SEM Stage series Cooling SEM stage 100 -100℃/Biasing / EBSD / IGS Elecryo Vacuum Transfer -100 Biasing / Cooling / Vacuum Transfer Eleheat Vacuum Transfer 300 Heating / Biasing / Vacuum Transfer Heating Tensile 1500N Heating 1000℃ / Hifh Power Tensile EBSD Heating Stage 100℃ Heating 1000℃ / EBSD 3D EBSD Heating 800 FIB / 3D EBSD / Heating